发明名称 Optical system, exposure apparatus using the same and device manufacturing method
摘要 An optical system includes first and second optical systems, a first controller for controlling a temperature of the first optical system to a first temperature, and a second controller for controlling a temperature of the second optical system to a second temperature different from the first temperature.
申请公布号 US2005190347(A1) 申请公布日期 2005.09.01
申请号 US20050067072 申请日期 2005.02.25
申请人 SUZUKI MASAYUKI 发明人 SUZUKI MASAYUKI
分类号 G03F7/20;(IPC1-7):G03B27/52 主分类号 G03F7/20
代理机构 代理人
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