发明名称 Detection of gas species by optical emission spectroscopy with spectrum processing
摘要 The process, using the radiation emitted by a plasma present in a gas mixture to be analyzed to produce a rough optical spectrum for comparison, includes a stage in which a clean optical spectrum is generated, retaining only those zones in the rough spectrum containing a significant form corresponding to a predefined form criterion, and then comparing the clean spectrum with a library of reference optical spectra. A plasma source is used to generate a plasma in the gas mixture being analyzed, and a system for collecting and transmitting the radiation emitted by the plasma to an optical spectrometer, with the signals from the latter being analyzed by a computer. The predefined form criterion can be the variation in amplitude of luminous radiation as a function of wavelength in the rough spectrum, with the maximum amplitude values and the corresponding wavelengths in the rough optical spectrum zones adjacent to a zone in which the amplitude variation is greater than a predetermined threshold level.
申请公布号 EP1568988(A1) 申请公布日期 2005.08.31
申请号 EP20050290331 申请日期 2005.02.15
申请人 ALCATEL 发明人 SOGAN, GLORIA;BOUNOUAR, JULIEN;DESBIOLLES, JEAN-PIERRE;GAURAND, ISABELLE
分类号 G01J3/443;G01N21/71;G01N21/68;H01J37/32 主分类号 G01J3/443
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