发明名称 |
METHOD OF PRODUCING AN N-TYPE DIAMOND WITH HIGH ELECTRICAL CONDUCTIVITY |
摘要 |
The production of an n type diamond incorporates an n type doping stage, in which a donor species is made to diffuse under vacuum into a diamond initially doped with an acceptor, in order to form with it donor groups containing the donor species, at a temperature of less than or equal to the dissociation temperature for the complexes formed between the acceptor and the donor species. An Independent claim is also included for n type diamond doped with hydrogen and boron and possessing a conductivity at 300 K greater than or essentially equal to 1 OMEGA-1cm-1. |
申请公布号 |
EP1568072(A1) |
申请公布日期 |
2005.08.31 |
申请号 |
EP20030796163 |
申请日期 |
2003.12.04 |
申请人 |
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS);UNIVERSITE DE VERSAILLES SAINT-QUENTIN-EN-YVELINES |
发明人 |
CHEVALLIER, JACQUES, PAUL, MARIE;TEUKAM, ZEPHIRIN, SYMPLICE;BALLUTAUD, DOMINIQUE |
分类号 |
C30B31/00;C30B31/06;H01L21/04;H01L21/205;H01L21/223 |
主分类号 |
C30B31/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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