发明名称 METHOD OF PRODUCING AN N-TYPE DIAMOND WITH HIGH ELECTRICAL CONDUCTIVITY
摘要 The production of an n type diamond incorporates an n type doping stage, in which a donor species is made to diffuse under vacuum into a diamond initially doped with an acceptor, in order to form with it donor groups containing the donor species, at a temperature of less than or equal to the dissociation temperature for the complexes formed between the acceptor and the donor species. An Independent claim is also included for n type diamond doped with hydrogen and boron and possessing a conductivity at 300 K greater than or essentially equal to 1 OMEGA-1cm-1.
申请公布号 EP1568072(A1) 申请公布日期 2005.08.31
申请号 EP20030796163 申请日期 2003.12.04
申请人 CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS);UNIVERSITE DE VERSAILLES SAINT-QUENTIN-EN-YVELINES 发明人 CHEVALLIER, JACQUES, PAUL, MARIE;TEUKAM, ZEPHIRIN, SYMPLICE;BALLUTAUD, DOMINIQUE
分类号 C30B31/00;C30B31/06;H01L21/04;H01L21/205;H01L21/223 主分类号 C30B31/00
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