发明名称 |
Methods and apparatus for enhanced operation of substrate carrier handlers |
摘要 |
<p>A carrier handler is provided that may be adapted to (1) accept transfer commands for carriers before the carriers arrive within the domain of the carrier handler (302); (2) accept termination commands that result in prior commands being cancelled or aborted independent of the state of the prior commands; (3) select queued commands for out-of-order execution to take advantage of earliest arriving transport system (316) carrier supports suitable for use with the selected commands and/or based upon the anticipated time needed to execute the commands; (4) remove empty carriers from an associated tool to improve port availability; (5) continue to operate even after transfers involving storage locations fail by removing the failed locations from a usable locations list; (6) verify the integrity of carrier and transfer destination status data with sensors prior to attempting a transfer; and (7) calibrate carrier handoffs with a transport system using a calibration carrier equipped with sensors.</p> |
申请公布号 |
EP1569262(A2) |
申请公布日期 |
2005.08.31 |
申请号 |
EP20050004338 |
申请日期 |
2005.02.28 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
TEFERRA, MICHAEL;PURI, AMIT |
分类号 |
H01L21/00;G05B19/418;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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