PATTERN FORMING METHOD OF SEMICONDUCTOR DEVICE,申请号KR20020043038-传众专利搜索

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发明名称	PATTERN FORMING METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号	KR100510999(B1)	申请公布日期	2005.08.31
申请号	KR20020043038	申请日期	2002.07.22
申请人		发明人
分类号	G03F7/11;H01L21/027;G03F7/09;G03F7/38;H01L21/311;H01L21/3213;(IPC1-7):H01L21/027	主分类号	G03F7/11
代理机构		代理人
主权项
地址

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