发明名称 COUPLING SYSTEM FOR THE TRANSFER OF A CONFINED PLANAR OBJECT FROM A CONTAINMENT POD TO AN OBJECT PROCESSING UNIT
摘要 <p>A coupling system for the transfer of a flat object from a confinement box towards a processing unit for processing the flat object. The coupling system includes a first shutter, at least one second opening, a second shutter, and a third shutter associated with the second opening on a side facing the processing unit, and devices for releasing the first, second and third shutter, after coupling the transfer opening of the confinement box with the transfer opening of the processing unit, in order to allow the transfer of the object between the confinement box and the processing unit.</p>
申请公布号 EP0891629(B1) 申请公布日期 2005.08.31
申请号 EP19970919463 申请日期 1997.04.02
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 DOCHE, CLAUDE
分类号 B65G49/00;B65G49/07;H01L21/00;H01L21/677;(IPC1-7):H01L21/00 主分类号 B65G49/00
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