| 摘要 |
The apparatus has a clamping chuck (1) has a central opening (2) for receiving a clamping pin (11) which clamps a workpiece carrier (10), and gas outlet openings (6) located in conical inserting portion (3) of central opening for blowing a gaseous medium against exposed surface portions (12,12a) of clamping pin to clean the surfaces upon inserting clamping pin into central opening of clamping chuck. The workpiece carrier is releasably connected to the clamping chuck. The workpiece carrier has a flat bottom surface (10a) and comprising the clamping pin protruding from the flat bottom surface. The clamping chuck comprises a clamping mechanism for fixing the clamping pin of the workpiece carrier in the central opening. The clamping pin has a rear section adjacent to the flat bottom surface of the workpiece carrier. The exposed surface portions of the clamping pin engages the conical inserting portion of the central opening for aligning the position of the clamping pin in X or Y directions. |
