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发明名称
摘要
申请公布号
JP3690372(B2)
申请公布日期
2005.08.31
申请号
JP20020187201
申请日期
2002.06.27
申请人
发明人
分类号
H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/3065
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