| 摘要 |
<p>A testing apparatus, by which an optical system to irradiate a test light to a solid-state imaging device is easily aligned with the solid-state imaging device and highly efficient tests can be conducted, is provided. <??>It includes an optical module 35 for irradiating a light from a light source to a light receiving surface of the solid-state imaging device through a pin hole, a probe card 20 having contact probes for contacting pads of the solid-state imaging device, and a motor 30 and a holding arm 31 for moving the optical module 35 to a predetermined position corresponding to the solid-state imaging device to be tested through an opening 20h provided to the probe card 20 in a state where the contact probes 21 contact the pads of the solid-state imaging device to be tested. <IMAGE></p> |
