| 发明名称 |
Compensating for cable drag forces in high precision stages |
| 摘要 |
A positioning system is disclosed. The positioning system includes a movable stage. The positioning system also includes a cable carrier movable relative to the stage. The cable carrier is configured for carrying a cable so as to prevent cable drag forces from acting on the stage.
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| 申请公布号 |
US6937911(B2) |
申请公布日期 |
2005.08.30 |
| 申请号 |
US20020100748 |
申请日期 |
2002.03.18 |
| 申请人 |
NIKON CORPORATION |
发明人 |
WATSON DOUGLAS C. |
| 分类号 |
H01L21/68;B23Q1/00;B23Q1/58;G03F7/20;H01L21/027;(IPC1-7):G05B19/18 |
主分类号 |
H01L21/68 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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