| 发明名称 |
Single proof mass, 3 axis MEMS transducer |
| 摘要 |
A transducer is provided herein which comprises an unbalanced proof mass ( 51 ), and which is adapted to sense acceleration in at least two mutually orthogonal directions. The proof mass ( 51 ) has first ( 65 ) and second ( 67 ) opposing sides that are of unequal mass.
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| 申请公布号 |
US6936492(B2) |
申请公布日期 |
2005.08.30 |
| 申请号 |
US20040009109 |
申请日期 |
2004.12.10 |
| 申请人 |
FREESCALE SEMICONDUCTOR, INC. |
发明人 |
MCNEIL ANDREW C.;LI GARY;KOURY, JR. DANIEL N. |
| 分类号 |
G01P15/125;G01P15/18;(IPC1-7):H01G5/18 |
主分类号 |
G01P15/125 |
| 代理机构 |
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