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发明名称
APPARATUS FOR EXHAUSTING A FUME IN CHAMBER
摘要
申请公布号
KR20050086152(A)
申请公布日期
2005.08.30
申请号
KR20040012513
申请日期
2004.02.25
申请人
CANG, DONG BOK
发明人
CANG, DONG BOK
分类号
H01L21/02;(IPC1-7):H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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