发明名称 |
Method and device for in situ layer thickness determination |
摘要 |
A method and device for layer thickness determination allows for the layer thickness to be determined in situ during the coating process. This is achieved using a sensor which has an electrical property which, as a result of the coating process, changes in a manner which is representative of the layer thickness which has been reached. As such, this property can be measured.
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申请公布号 |
US6936299(B2) |
申请公布日期 |
2005.08.30 |
申请号 |
US20030434165 |
申请日期 |
2003.05.09 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
BAST ULRICH;BEYER ROMAN;REICHE RALPH |
分类号 |
C23C2/14;C23C4/12;C23C4/16;C23C14/54;C23C16/52;G01B7/06;(IPC1-7):B05D7/22;B23C16/00 |
主分类号 |
C23C2/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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