On-chip inductor having a square geometry and high Q factor and method of manufacture thereof

摘要

An on-chip inductor and/or on-chip transformer includes at least one dielectric layer and at least one conductive winding on the at least one dielectric layer. The conductive winding has a substantially square geometry and has at least its exterior corners geometrically shaped to reduce impedance of the conductive winding at a particular operating frequency. Since the quality factor of an on-chip inductor is inversely proportional to the effective series impedance of an inductor at an operating frequency, by reducing the effective series impedance, the quality factor is increased.