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发明名称
STRUCTURE OF ELECTROSTATIC CHUCK
摘要
申请公布号
KR20050086131(A)
申请公布日期
2005.08.30
申请号
KR20040012487
申请日期
2004.02.25
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
SIN, IL KWON
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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