| 发明名称 |
METHOD FOR POLISHING A MEMORY OR RIGID DISK WITH AN AMINO ACID-CONTAINING COMPOSITION |
| 摘要 |
A METHOD OF PLANARIZING OR POLISHING THE SURFACE OF A MEMORY OR RIGID DISK COMPRISING ABRADING AT LEAST A PORTION OF THE SURFACE WITH (I) A POLISHING COMPOSITION COMPRISING AN OXIDIZING AGENT SELECTED FROM THE GROUP CONSISTING OF PERSULFATES AND PEROXIDES, AN AMINO ACID, AND WATER, AND (II) AN ABRASIVE. |
| 申请公布号 |
MY119974(A) |
申请公布日期 |
2005.08.30 |
| 申请号 |
MY2001PI01563 |
申请日期 |
2001.04.02 |
| 申请人 |
CABOT MICROELECTRONICS CORPORATION |
发明人 |
MINGMING FANG;SHUMIN WANG |
| 分类号 |
B24B37/00;C09G1/02;C09K3/14 |
主分类号 |
B24B37/00 |
| 代理机构 |
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