发明名称 APPLICABILITY IMPROVER FOR PHOTOSENSITIVE RESIN COMPOSITION AND PHOTOSENSITIVE RESIN COMPOSITION CONTAINING THE SAME
摘要 In order to solve simultaneously the problems of scaly unevenness and beaded edge occurring in applying a photosensitive resin composition to a large substrate, a photosensitive resin composition comprising an alkali-soluble resin such as novolak and a photosensitizer having a naphthoquinonediazido group is incorporated with a silicone oil represented by the following general formula in an amount of 50 to 5,000ppm based on the whole solid matter of the composition: wherein R1, R2, R3, R4, R5 and R6 are each independently hydrogen, hydroxyl, C1-4 alkyl, or aryl; m is an integer of 1 to 40; and n is an integer of 1 to 40.
申请公布号 KR20050085055(A) 申请公布日期 2005.08.29
申请号 KR20057009025 申请日期 2003.11.14
申请人 AZ ELECTRONIC MATERIALS (JAPAN) K.K. 发明人 WATANABE JUNICHIRO;TAKEDA TAKASHI
分类号 G03F7/004;C08G77/04;G03F7/022;G03F7/023;G03F7/039;G03F7/075;H01L21/027;(IPC1-7):G03F7/075 主分类号 G03F7/004
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