发明名称 |
METHOD AND DEVICE FOR MICROWAVE PLASMA DEPOSITION OF A COATING ON A THERMOPLASTIC CONTAINER SURFACE |
摘要 |
<p>The invention concerns the deposition of a coating on a thermoplastic container surface (3) using low pressure plasma by excitation of a precursor gas with UHF electromagnetic waves in a circular shaped vacuum cavity (1) receiving the container. It consists in dimensioning the cavity (1) with respect to the frequency of the UHF electromagnetic waves so as to obtain a coupling mode generating several electromagnetic fields inside the cavity. In particular a TM 120 coupling mode is provided which generates two central fields (4A, 4 B) inside the cavity, whereby two containers (3) can be simultaneously treated in said cavity (1).</p> |
申请公布号 |
KR20050085174(A) |
申请公布日期 |
2005.08.29 |
申请号 |
KR20057009570 |
申请日期 |
2005.05.26 |
申请人 |
SIDEL |
发明人 |
RIUS JEAN MICHEL;PERNEL YANN |
分类号 |
C23C16/04;C23C16/511;H01J37/32;H05H1/24;(IPC1-7):H05H1/46 |
主分类号 |
C23C16/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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