发明名称 METHOD AND DEVICE FOR MICROWAVE PLASMA DEPOSITION OF A COATING ON A THERMOPLASTIC CONTAINER SURFACE
摘要 <p>The invention concerns the deposition of a coating on a thermoplastic container surface (3) using low pressure plasma by excitation of a precursor gas with UHF electromagnetic waves in a circular shaped vacuum cavity (1) receiving the container. It consists in dimensioning the cavity (1) with respect to the frequency of the UHF electromagnetic waves so as to obtain a coupling mode generating several electromagnetic fields inside the cavity. In particular a TM 120 coupling mode is provided which generates two central fields (4A, 4 B) inside the cavity, whereby two containers (3) can be simultaneously treated in said cavity (1).</p>
申请公布号 KR20050085174(A) 申请公布日期 2005.08.29
申请号 KR20057009570 申请日期 2005.05.26
申请人 SIDEL 发明人 RIUS JEAN MICHEL;PERNEL YANN
分类号 C23C16/04;C23C16/511;H01J37/32;H05H1/24;(IPC1-7):H05H1/46 主分类号 C23C16/04
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