摘要 |
A vertical elevated pore structure for a phase change memory (10) may include a pore (46) with a lower electrode (24, 26) beneath the pore contacting the phase change material (18) in the pore (46). The lower electrode may be made up of a higher resistivity lower electrode (24) and a lower resistivity lower electrode (26) underneath the higher resistivity lower electrode (24). As a result, more uniform heating of the phase change material (18) may be achieved in some embodiments and better contact may be made in some cases. |