发明名称 Method for forming bump without surface defect
摘要 <p>A method of forming a solder bump may involve forming a first photoresist pattern on a wafer having a pad. The first photoresist pattern may have an opening that exposes a portion of the pad. A first under bump metallurgy (UBM) layer may be formed on the pad, and a second UBM layer may be formed on the first photoresist pattern. A second photoresist pattern may be formed that exposes the first UBM layer. A solder bump may be formed in the opening. The second photoresist pattern and the first photoresist pattern may be removed using a stripper, thereby removing the second UBM layer by a lift-off method.</p>
申请公布号 KR100510543(B1) 申请公布日期 2005.08.26
申请号 KR20030058003 申请日期 2003.08.21
申请人 发明人
分类号 H01L21/60;H01L21/44;H01L21/50;H01L23/485;(IPC1-7):H01L21/60 主分类号 H01L21/60
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