发明名称 USER INTERFACE FOR QUANTIFYING WAFER NON-UNIFORMITIES AND GRAPHICALLY EXPLORE SIGNIFICANCE
摘要 A wafer viewer system is provided for graphical presentation and analysis of a wafer and a wafer series. More specifically, the wafer viewer system includes a graphical user interface for displaying a wafer, graphically selecting regions of the wafer for analysis, performing analysis on the selected regions of the wafer, and displaying results of the analysis.
申请公布号 KR20050084603(A) 申请公布日期 2005.08.26
申请号 KR20057005323 申请日期 2003.09.24
申请人 LAM RESEARCH CORPORATION 发明人 LUQUE JORGE;BAILEY III ANDREW D.;WILCOXSON MARK
分类号 H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/66
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