METHOD AND SYSTEM FOR FABRICATING MULTILAYER DEVICES ON A SUBSTRATE

摘要

A method for fabricating multi layer active devices on a bulk substrate is disclosed. Multi layer microelectromechanical and microfluidic devices are fabricated on a substrate with layers of predetermined weak and strong bond regions where deconstructed layers of devices at or on the weak bond regions. Multi layer integrated circuits are fabricated on a substrate with layers of predetermined weak and strong bond regions is disclosed. An arbitrary number of layers can be bonded and stacked to create a predetermined device on the substrate. Also disclosed are methods of creating edge interconnects and vias through the substrate to form interconnections between layers and devices thereon.