发明名称 |
ULTRAVIOLET LIGHT SOURCE, PHOTOTHERAPY APPARATUS USING ULTRAVIOLET LIGHT SOURCE, AND EXPOSURE SYSTEM USING ULTRAVIOLET LIGHT SOURCE |
摘要 |
An ultraviolet light source (1) comprises a laser light source (10) for generating a signal light in the infrared region, a light amplifier (20) which comprises fiber light amplifiers (21, 22) and amplifies the signal light generated by the laser light source (10), and a wavelength converting optical system (30) which converts the signal light amplified by the light amplifier (20) to an ultraviolet light and outputs the converted light. The ultraviolet light source (1) uses a single-mode fiber laser (26) as an excitation light source for at least the fiber light amplifier (22) at one stage of the light amplifier (20).
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申请公布号 |
KR20050084198(A) |
申请公布日期 |
2005.08.26 |
申请号 |
KR20057010344 |
申请日期 |
2003.12.10 |
申请人 |
NIKON CORPORATION |
发明人 |
TOKUHISA AKIRA;KITANO HIROSHI |
分类号 |
A61F9/01;G01N21/956;G02F1/35;G03F7/20;H01S3/067;H01S3/094;H01S3/108;H01S3/23;H01S3/30;(IPC1-7):H01S3/10 |
主分类号 |
A61F9/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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