发明名称 |
METHOD AND APPARATUS FOR MEASURING THICKNESS OF THIN FILMS VIA TRANSIENT THERMOREFLECTANCE |
摘要 |
A method for measuring the thickness of a film is based on monitoring a transient change of the reflectivity of the film following an impulsive heating. The method includes the steps of impulsively irradiating a surface of the film with an excitation pulse to cause a rise in temperature in the film; irradiating the surface of the film with a probe beam, such that it reflects off the surface of the film to generate a reflected probe beam; detecting a time-dependent variation in intensity of the reflected probe beam; generating a signal waveform based on the measured variations in intensity; and determining the thickness of the film based on the signal waveform.
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申请公布号 |
KR20050084282(A) |
申请公布日期 |
2005.08.26 |
申请号 |
KR20057010792 |
申请日期 |
2005.06.13 |
申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V. |
发明人 |
MAZNEV ALEXEI |
分类号 |
G01B11/06;G01N21/17;G01N21/84;(IPC1-7):H01L21/66 |
主分类号 |
G01B11/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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