发明名称 |
Method for manufacturing conductive element substrate, conductive element substrate, method for manufacturing liquid crystal display, liquid crystal display and electronic information equipment |
摘要 |
A method for manufacturing a liquid crystal display which employs an active matrix substrate including a plurality of pixels arranged in matrix on a substrate and reflecting electrodes formed in the pixels, respectively. The method comprises (a) a laminated conductive film formation step of sequentially forming a conductive metal film and an amorphous transparent conductive film on a substrate to form a laminated conductive film and (b) a reflecting electrode formation step of patterning the laminated conductive film into a reflecting electrode, wherein the step (b) includes a first etching step of etching the conductive metal film and the amorphous transparent conductive film simultaneously and a second etching step of etching the amorphous transparent conductive film only.
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申请公布号 |
US2005186359(A1) |
申请公布日期 |
2005.08.25 |
申请号 |
US20050060677 |
申请日期 |
2005.02.18 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
ISHIZUKA KAZUHIRO;FUJIKAWA TAKASHI;SAKAI TAKEHIKO |
分类号 |
C09K19/00;C23F1/00;C23F1/02;C23F1/16;C23F1/20;C23F1/26;C23F1/44;G02F1/133;G02F1/1335;G02F1/1343;G02F1/1362;G09F9/00;G09F9/30;(IPC1-7):C09K19/00 |
主分类号 |
C09K19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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