发明名称 |
SINGLE-ELECTRON TRANSISTOR, FIELD-EFFECT TRANSISTOR, SENSOR, AND MANUFACTURING AND SENSING METHODS THEREOF |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a single-electron transistor, a field-effect transistor, a sensor, and the manufacturing and sensing methods of the sensor which have a largely superior sensitivity, compared to the conventional transistors. <P>SOLUTION: The single-electron transistor has at least a substrate 1, has at least a source electrode 3 and a drain electrode 4 provided opposite to each other above the substrate 1, and a channel installed between the source and drain electrodes 3, 4. In this transistor, the channel is constituted out of an ultrafine fiber (CNT) 7. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
申请公布号 |
JP2005229017(A) |
申请公布日期 |
2005.08.25 |
申请号 |
JP20040037866 |
申请日期 |
2004.02.16 |
申请人 |
JAPAN SCIENCE & TECHNOLOGY AGENCY;NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY |
发明人 |
MUKASA KOICHI;MATSUMOTO KAZUHIKO;ISHII MUTSUMI;TAKEDA SEIJI;SAWAMURA MAKOTO;SUBAGYO AGUS;HOSOI HIROTAKA;SUEOKA KAZUHISA;KIDA HIROSHI;SAKOTA YOSHIHIRO |
分类号 |
G01N27/327;B82B1/00;G01N27/414;H01L29/06;H01L29/66;H01L29/786 |
主分类号 |
G01N27/327 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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