HEATER UNIT AND EQUIPMENT PROVIDED THEREWITH

摘要

PROBLEM TO BE SOLVED: To provide a heater unit with an improved evenness of heat generation on a heater substrate and to provide equipment installed on this heater unit. SOLUTION: This heater unit 1 consists of a heater substrate 2 for mounting and heating the object S and a container 3 for covering the heater substrate 2, the container 3 at least covers the side of the heater substrate 2 that holds the object to be heated, and the difference is 2.2 mm or smaller in between the maximum and minimum distance values in the perimeter between the side of the heater substrate 2 and the inner surface of the facing container 3. When a cooling block is provided, up to the sides of the cooling block is to be covered. COPYRIGHT: (C)2005,JPO&NCIPI