METHOD FOR HEATING AND DRYING COATING FILM, AND HEATING AND DRYING APPARATUS FOR COATING FILM

摘要

PROBLEM TO BE SOLVED: To solve the problem that the peripheral edge part of a coating film is swelled in heating and drying the coating film. SOLUTION: A method for drying the coating film is provided by which the swelling of the peripheral edge part of the coating film in heating and drying is prevented to obtain the coating film having uniform thickness by giving potential to the coating film surface and supplying a solvent during the drying. COPYRIGHT: (C)2005,JPO&NCIPI