| 摘要 |
A gas sensor for sensing a gas stream constituent includes, mounted a substrate, a first gas-sensing element capable of sensing the constituent in a first concentration range, a reference element insensitive to the constituent and having electrical properties congruent with the first gas-sensing element, a heating element substantially circumscribing the first gas-sensing element and the reference element, a temperature-sensing element circumscribing the first gas-sensing element and the reference element, and a second gas-sensing element capable of sensing the constituent in a second concentration range. The first gas-sensing element and the reference element are preferably metal-gated metal-oxide semiconductor (MOS) solid-state devices. The gas sensor is particularly configured to sense hydrogen concentration in a gas stream.
|
