发明名称 Perpendicular pole structure and method of fabricating the same
摘要 A magnetic structure, such as a pole tip, and method for forming the same includes forming a pole tip layer of magnetic material. A layer of polyimide precursor material is added above the pole tip layer and cured. A silicon-containing resist layer is added above the layer of polyimide precursor material and patterned. The resist layer is exposed to oxygen plasma for converting the resist into a glass-like material. Exposed portions of the cured polyimide precursor material are removed for exposing portions of the pole tip layer. The exposed portions of the pole tip layer are removed for forming a pole tip. Chemical mechanical polishing (CMP) can then be performed to remove any unwanted material remaining above the pole tip.
申请公布号 US2005185332(A1) 申请公布日期 2005.08.25
申请号 US20040883336 申请日期 2004.06.30
申请人 HITACHI GLOBAL STORAGE TECHNOLOGIES 发明人 HSIAO RICHARD;JAYASEKARA WIPUL P.;LILLE JEFFREY S.
分类号 B24B1/00;G11B5/127;G11B5/147;G11B5/187;G11B5/265;(IPC1-7):G11B5/187 主分类号 B24B1/00
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