申请人 |
KLA-TENCOR TECHNOLOGIES;MARELLA, PAUL FRANK;MCCAULEY, SHARON;CHANG, ELLIS;VOLK, WILLIAM;WILEY, JAMES;WATSON, STERLING;KEKARE, SAGAR A.;HESS, CARL |
发明人 |
MARELLA, PAUL FRANK;MCCAULEY, SHARON;CHANG, ELLIS;VOLK, WILLIAM;WILEY, JAMES;WATSON, STERLING;KEKARE, SAGAR A.;HESS, CARL |