| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve drive efficiency by avoiding the sticking state between the mobile and the stator of an electrostatic actuator by a simple constitution. <P>SOLUTION: In the electrostatic actuator comprising a fixing board 16 which has a plurality of driving electrodes 12 and a moving member 18 which is arranged on the above fixing board and relatively shifts to the above fixing board by the electrostatic force generated between itself and the above driving electrodes, an electret 20 is arranged on the side of the above moving member, and another electret 20 is arranged opposite to the electret 20, and the friction working between the above moving member and the above fixing board is reduced by the electrostatic force generated between both electrets 20. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
