| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing apparatus and a method therefor which reliably washes even particles of a comparatively large size occurring accidentally and prevents and remove re-sticking of them. SOLUTION: The washing apparatus is provided with a rotor which is rotated with a plurality of substrates to be washed which are arranged parallelly to each other with respective centers nearly matched with a rotary shaft, a washing liquid supply pipe which is arranged parallelly to the rotary shaft to supply washing liquid to each of the plurality of substrates to be washed, a chamber for housing the rotor and the washing liquid supply pipe, and a waste liquid port formed at one end in a direction parallel to the rotary shaft of the chamber for draining the washing liquid supplied from the nozzles. The size of the aperture of at least one nozzle provided at an end on a waste liquid port side among the plurality of the nozzles is larger than the sizes of the apertures of the other nozzles. COPYRIGHT: (C)2005,JPO&NCIPI
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