| 摘要 |
PROBLEM TO BE SOLVED: To provide technology for previously preventing the contamination of a processor due to an operation error and an erroneous conveyance processing in the manufacture line of a semiconductor device. SOLUTION: Processed pieces of information (processor ID, wafer ID, processing recipe or the like) are written in an ID tag 16 loaded on FOUP 15 in an ID reader/writer 14 on a previously performed processor 11. In an ID reader/writer 14 on the progress of successively performed processor 11, information is read and propriety is judged in a device controller 12 or a processing control computer 13. The contamination of the processor 11 and the product failure of the semiconductor device are prevented. The propriety of progress in the device controller 12 is judged by comparing the processor ID which is read with the previously registered processor ID. In a judgment of the propriety of progress of performance in the processing control computer 13, a process flow on information which is read is checked. COPYRIGHT: (C)2005,JPO&NCIPI
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