发明名称 Semiconductor device and method of manufacturing the same
摘要 An isolation insulating film ( 5 ) of partial-trench type is selectively formed in an upper surface of a silicon layer ( 4 ). A power supply line ( 21 ) is formed above the isolation insulating film ( 5 ). Below the power supply line ( 21 ), a complete isolation portion ( 23 ) reaching an upper surface of an insulating film ( 3 ) is formed in the isolation insulating film ( 5 ). In other words, a semiconductor device comprises a complete-isolation insulating film which is so formed as to extend from the upper surface of the silicon layer ( 4 ) and reach the upper surface of insulating film ( 3 ) below the power supply line ( 21 ). With this structure, it is possible to obtain the semiconductor device capable of suppressing variation in potential of a body region caused by variation in potential of the power supply line.
申请公布号 US2005184342(A1) 申请公布日期 2005.08.25
申请号 US20050108843 申请日期 2005.04.19
申请人 发明人 HIRANO YUUICHI;MAEGAWA SHIGETO;IWAMATSU TOSHIAKI;MATSUMOTO TAKUJI;MAEDA SHIGENOBU;YAMAGUCHI YASUO
分类号 H01L21/762;H01L21/3205;H01L21/76;H01L21/822;H01L21/8238;H01L21/84;H01L23/52;H01L27/04;H01L27/08;H01L27/092;H01L27/12;H01L29/786;(IPC1-7):H01L21/336;H01L31/039;H01L27/01;H01L21/331;H01L21/00 主分类号 H01L21/762
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