| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveyance system that can reduce the installation area of an entire system without lowering the production capacity of a production line. SOLUTION: A shelf T is installed when any difference occurs in processing capacity among processing steps by failure or maintenance inspection of processors 2, and the shelf T for temporary storage of a glass substrate 12 and a crane 13 are shared for a plurality of processing steps. COPYRIGHT: (C)2005,JPO&NCIPI
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