发明名称 High throughput surface treatment on coiled flexible substrates
摘要 One or more substrates may be coiled into one or more coils in such a way that adjacent turns of the coils do not touch one another. The one or more coiled substrates are placed in a treatment chamber where substantially an entire surface of the one or more coiled substrates may be treated with a surface treatment process. One or more spacers may be placed between adjacent layers of the coiled substrate before a full turn of the substrate has been coiled around a carousel.
申请公布号 US2005186338(A1) 申请公布日期 2005.08.25
申请号 US20040782545 申请日期 2004.02.19
申请人 NANOSOLAR, INC. 发明人 ROSCHEISEN MARTIN R.;PICHLER KARL
分类号 B05D3/12;C23C16/00;C23C16/40;C23C16/455;C23C16/458;C23C16/54;(IPC1-7):C23C16/00 主分类号 B05D3/12
代理机构 代理人
主权项
地址