发明名称 |
High throughput surface treatment on coiled flexible substrates |
摘要 |
One or more substrates may be coiled into one or more coils in such a way that adjacent turns of the coils do not touch one another. The one or more coiled substrates are placed in a treatment chamber where substantially an entire surface of the one or more coiled substrates may be treated with a surface treatment process. One or more spacers may be placed between adjacent layers of the coiled substrate before a full turn of the substrate has been coiled around a carousel.
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申请公布号 |
US2005186338(A1) |
申请公布日期 |
2005.08.25 |
申请号 |
US20040782545 |
申请日期 |
2004.02.19 |
申请人 |
NANOSOLAR, INC. |
发明人 |
ROSCHEISEN MARTIN R.;PICHLER KARL |
分类号 |
B05D3/12;C23C16/00;C23C16/40;C23C16/455;C23C16/458;C23C16/54;(IPC1-7):C23C16/00 |
主分类号 |
B05D3/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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