PIEZOELECTRIC THIN-FILM ELECTROMECHANICAL MICROSYSTEM DEVICE

摘要

A piezoelectric thin-film electromechanical microsystem (MEMS) device (18) comprising an RF-MEMS switch (14) and a bulk acoustic wave piezoelectric thin-film RF resonator (10) mounted on a substrate (12) provided with an acoustic mirror (28). The resonator comprises a thin-film portion (16) between the two metal electrodes (20, 24). The switch (14) comprises a two-layer crossarm with an insulator layer (38) combined with a different portion (36) of the piezoelectric film (18) and having a movable metal contact (50) engageable with the stationary metal contacts (46, 48) when the crossarm is bent by a voltage across the control electrodes (40, 42).