发明名称 |
METHOD FOR PRODUCING THIN SEMICONDUCTOR FILMS BY DEPOSITION FROM SOLUTION |
摘要 |
A method is described for producing thin semiconductor films on a substrate by contacting a substrate with a solution containing a noble metal in its elemental form to which is sequentially added an aqueous solution comprising a metal salt, a source of a Group Via element, and chelating agent. The resulting semiconductor films are useful for electronic and photovoltaic applications. |
申请公布号 |
WO2005031035(B1) |
申请公布日期 |
2005.08.25 |
申请号 |
WO2004US31569 |
申请日期 |
2004.09.27 |
申请人 |
E. I. DU PONT DE NEMOURS AND COMPANY;METH, JEFFREY, S. |
发明人 |
METH, JEFFREY, S. |
分类号 |
C23C18/16;C23C18/18;C23C18/31;H01L21/288;H01L21/368;(IPC1-7):C23C18/16 |
主分类号 |
C23C18/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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