发明名称 METHOD FOR PRODUCING THIN SEMICONDUCTOR FILMS BY DEPOSITION FROM SOLUTION
摘要 A method is described for producing thin semiconductor films on a substrate by contacting a substrate with a solution containing a noble metal in its elemental form to which is sequentially added an aqueous solution comprising a metal salt, a source of a Group Via element, and chelating agent. The resulting semiconductor films are useful for electronic and photovoltaic applications.
申请公布号 WO2005031035(B1) 申请公布日期 2005.08.25
申请号 WO2004US31569 申请日期 2004.09.27
申请人 E. I. DU PONT DE NEMOURS AND COMPANY;METH, JEFFREY, S. 发明人 METH, JEFFREY, S.
分类号 C23C18/16;C23C18/18;C23C18/31;H01L21/288;H01L21/368;(IPC1-7):C23C18/16 主分类号 C23C18/16
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