PURIFYING APPARATUS OF SiO, PURIFYING METHOD OF SiO USING THE SAME AND MANUFACTURING METHOD OF HIGH PURIFIED SILICON

摘要

PROBLEM TO BE SOLVED: To provide a purifying apparatus of SiO with the low P concentration from a SiO raw material with the high P concentration, and to provide a manufacturing method of a high purified Si using such a purified SiO. SOLUTION: The purifying apparatus is a SiO purifying apparatus containing a SiO generator, a first SiO condenser and an displacement pump. The purifying apparatus is characterized by arranging a second SiO condenser between the first SiO condenser and the displacement pump. The purifying method uses such a apparatus. The manufacturing method of the high purified Si uses the purified SiO. COPYRIGHT: (C)2005,JPO&NCIPI