| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inexpensive temperature-humidity exchanger outputting high pressure gas with a high dew point while carrying out positive gas-sealing of a gas manifold. <P>SOLUTION: An upper face seal part and a lower face seal part are provided surrounding manifolds through which gas is supplied and exhausted. Part of the upper face seal part and lower face seal part straddles collecting communication grooves, and an upper face seal forming plate and a lower face seal forming plate are provided in two stages in a laminating direction. The faces in the laminating direction of the upper face seal part and lower face seal part are flat. Further, the upper face seal forming plate and the lower face seal forming plate are arranged to be shifted from each other in projecting one on the other in the laminating direction. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
