| 摘要 |
PROBLEM TO BE SOLVED: To prevent a movable body from being displaced in the lateral direction and improve reliability by increasing spring force of support beams to the direction perpendicular to the direction of displacing the movable body. SOLUTION: The substrate 2 is provided with almost a U-shaped support beam 6 for supporting the movable body 3 to be displaceable in the direction of the axis Y. Then, the movable body 3 is displaced from an initial position to a change-over position by the electrostatic force across electrodes 10, 11. In this case, the support beams 6 are so constructed that arm parts 7, 8 are formed in a non-parallel form when the movable body 3 is at the initial position, and the arm parts 7, 8 are stretched almost in parallel in the direction of the axis X when the movable body 3 is largely displaced up to in the neighborhood of the change-over position. Thus, since the support beams 6 can be increased in the spring force in the direction of the axis X, electrodes 10, 11 can be prevented from being short-circuited by lateral displacement when the movable body 3 is displaced, and the movable body 3 can stably be displaced in a large quantity of displacement. COPYRIGHT: (C)2005,JPO&NCIPI |
