| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a magnetic recording head provided with a trim structure in which width of a direction corresponding to recording track width of a magnetic recording medium is uniform in a film thickness direction. SOLUTION: A lower part magnetic pole 10, a recording gap layer 20, a seed layer 30, and an upper part magnetic pole 40 are formed by using respectively materials indicating etching speed being equal mutually. The upper magnetic pole 40 is used as a mask, after the seed layer 30 is removed selectively by first IBE irradiating with an ion beam with a first incident angle, The upper magnetic pole 40 is used as the mask, the recording gap layer is removed selectively by second IBE irradiating with the ion beam with a second incident angle being lower than the first incident angle, further, and width of trim structure is decided by third IBE irradiating with the ion beam with the first incident angle. Thereby, trim structure having width W3 uniformalized highly accurately from the upper part to the lower part in the film thickness direction can be formed. COPYRIGHT: (C)2005,JPO&NCIPI
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