发明名称 |
APPARATUS FOR MANUFACTURING SINGLE CRYSTAL |
摘要 |
PROBLEM TO BE SOLVED: To provide such an apparatus for manufacturing a single crystal as having a wire changeable at an appropriate time and is excellent in the safety and productivity. SOLUTION: The apparatus is such an apparatus that an eddy current examining sensor 20 for detecting the abnormality (such as the breaking of an element wire) in a wire 12 to be wound up or wound down with a winch 11 is arranged at the neighborhood of the winch 11. This apparatus makes a non-destructive test for the wire 12 at a time of the loading or unloading using the above eddy current examining sensor 20 and sends an alarm signal on the basis of a detective signal level of the above sensor 20. COPYRIGHT: (C)2005,JPO&NCIPI
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申请公布号 |
JP2005225741(A) |
申请公布日期 |
2005.08.25 |
申请号 |
JP20040038808 |
申请日期 |
2004.02.16 |
申请人 |
KASHIWARA MACHINE MFG CO LTD;SUMITOMO MITSUBISHI SILICON CORP |
发明人 |
KAWABUCHI MITSURU;KUSANO KEIZO |
分类号 |
C30B15/30;C30B29/06;(IPC1-7):C30B15/30 |
主分类号 |
C30B15/30 |
代理机构 |
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