| 摘要 |
A wire bonding apparatus that include a piezoelectric element 4 provided near the capillary attachment portion of a bonding arm 1 so that a capillary 3 vibrates in the axial direction of the bonding arm 1 , the piezoelectric element 4 being driven by a piezoelectric element driving power source 11 . The wire bonding apparatus further includes a detector 15 and a bonding arm control circuit 16 , wherein the detector 15 detects the voltage or current generated by the piezoelectric element 4 when the capillary 3 is lowered and contacts the object of bonding, and the bonding arm control circuit 16 controls the lowering motion of the bonding arm 1 in accordance with the changes in the voltage or current detected by this detector 15.
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