发明名称 |
Semiconductor processor control systems |
摘要 |
Semiconductor processor systems, systems configured to provide a semiconductor workpiece process fluid, semiconductor workpiece processing methods, methods of preparing semiconductor workpiece process fluid, and methods of delivering semiconductor workpiece process fluid to a semiconductor processor are provided. One aspect of the invention provides a semiconductor processor system including a process chamber adapted to process at least one semiconductor workpiece using a process fluid; a connection coupled with the process chamber and configured to receive the process fluid; a sensor coupled with the connection and configured to output a signal indicative of the process fluid; and a control system coupled with the sensor and configured to control at least one operation of the semiconductor processor system responsive to the signal.
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申请公布号 |
US2005185180(A1) |
申请公布日期 |
2005.08.25 |
申请号 |
US20050068653 |
申请日期 |
2005.02.23 |
申请人 |
MOORE SCOTT E.;MEIKLE SCOTT G.;CRUM MAGDEL |
发明人 |
MOORE SCOTT E.;MEIKLE SCOTT G.;CRUM MAGDEL |
分类号 |
B24B37/04;B24B49/10;B24B57/02;(IPC1-7):G01N21/00;G01N31/00;H01L21/823;G01N33/00 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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