Miniaturised multifunctional sensor (MUFS), e.g. bidirectional compensated measuring mass air flow sensor for all relevant applications, such as extremely fast sensor for all types of combination engines, e.g. for car engines

摘要

A multi-functional sensor (MUF) is formed on a single chip as bidirectional compensated, mass air flow sensor for all applications, as particularly extremely fast sensor for all types and sizes of internal combustion engines, especially for car engines. All sensor elements are formed in thin-film technology. Additionally, measurements and IR balances are carried out on sensor chip in low temperature spectrum below 140 degrees C.