ALUMINUM ALLOY WIRING MATERIAL HAVING HIGH RESISTANCE TO HEAT AND TARGET MATERIAL

摘要

[PROBLEMS] To provide an aluminum alloy wiring material which is excellent both in high heat resistance and low electric resistance characteristics and thus is suitable for a low temperature process poly-Si THT being subjected to a heat treatment at a relatively high temperature of 500°C or higher, and a target material for the wiring material. [MEANS FOR SOLVING PROBLEMS] An aluminum alloy wiring material and a target material which contain nickel, cobalt and carbon, characterized in that it has a chemical composition, wherein the formulae: 0.5 at % <= X <= 3.0 at %, 4.0 at % <= X + Y <= 7.0 at %, and 0.1 at % <= Z <= 0.5 at % are satisfied, where X at % represents a nickel content in an atomic percentage, Y at % represents a cobalt content in an atomic percentage, and Z at % represents a carbon content in an atomic percentage, and the balance is aluminum.