发明名称 |
Method for operating an in-line coating installation |
摘要 |
A method for the operation of an in-line coating configuration comprising 2n+1 chambers, where n is an integer, and specifically is preferably 2. Thus, at least between two times two chambers of this installation one gate each can be opened and closed, it is possible to coat also overdimensioned substrates with the same installation. The opening and closing of the gates entails a change of the pressure courses in comparison to standard operation.
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申请公布号 |
US2005186346(A1) |
申请公布日期 |
2005.08.25 |
申请号 |
US20040806060 |
申请日期 |
2004.03.22 |
申请人 |
RICHERT HOLGER;WEIMANN MANFRED |
发明人 |
RICHERT HOLGER;WEIMANN MANFRED |
分类号 |
B65G49/00;B05C15/00;B65G49/06;C23C14/56;C23C16/455;H01L21/677;(IPC1-7):B05D3/00 |
主分类号 |
B65G49/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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