| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a transport device capable of reducing the cost of the device and reducing the whole weight by decreasing the number of motors used as driving sources. <P>SOLUTION: A transport device for transporting a subject of processing W holding the subject comprises a rotation base 24 rotatably supported by a base; first and second arm mechanisms 26 and 28 constituted by connecting first arms 26A and 28A, second arms 26B and 28B, and picks 26C and 28C in a bendable and stretchable manner in this order; a drive link mechanism 30 which is connected to the first arms of the first and the second arm mechanisms, and which puts the first and the second arm mechanisms into a circling motion; a first drive source 32 for rotationally driving the rotation base; and a second drive source 34 for driving the drive link mechanism. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
